Durable Soft Mold for Imprinting of High-Adhesive Resin

A variety of polymer resins have been used to fabricate micro/nano structures via imprint lithography. In addition, with an interest in productivity, there is increasing demand for the study process easily demolding a cured resin from mold continuous fabrication micro/nanostructures applying lithography roll-type equipment. Among these resins, Norland optical adhesive (NOA) particular widely structure-based functional surfaces because its shape memory characteristics, biocompatibility, and great characteristics. However, NOA originally as epoxy-based high adhesion. has many advantages UV-curable adhesive, but process, such adhesion brings limitation. This causes defects during so it difficult apply process. Here, we present durable polyurethane acrylate (PUA) soft capable clean having by depositing metal on surface. Au Ni were deposited thickness 100 ? using E-beam evaporator. To verify surface each metal-deposited was compared previously measuring contact angle calculating energy. test performance our mold, imprinted nanoline pattern roll (R2R) more than 240 replications 90 min operation time. It expected that this can be mass production patterns required fields.